Eryato ery'okuyonja Quartz Wafer
Eryato ery’okwoza wafer ya quartz kye kyuma ekikozesebwa mu kwoza wafer mu nkola y’okukola semiconductor.
Ebikozesebwa: 99.99% quartz
Okunnyonnyola
Ebintu eby'enjawulo
- Okugumira ebbugumu eringi
- Okuziyiza okukulukuta
- Yambala obuziyiza
- Kyangu okuyonja
Kozesa: ggyawo obucaafu obuli kungulu
Kakasa nti omutindo gw’okukola chips za semiconductor.
Okusaba
1. Okuyonja nga tekunnabaawo-Okusaasaana
Ekozesebwa okutambuza wafers okuyita mu mitendera gy’okuyonja mu ntebe ennyogovu oba mu kunnyika (okugeza, okuyonja kwa RCA) okuggyawo obucaafu obw’obutonde, ebyuma, n’obutundutundu nga tebannaba kukola nkola za kusaasaana oba oxidation mu bbugumu erya waggulu-.
2. Okwoza oluvannyuma lwa-CMP (Chemical Mechanical Planarization) Okwoza
Ekwata wafers mu kiseera ky'okuyonja oluvannyuma -polishing okumalawo ebisigadde mu slurry n'obulema kungulu, okukakasa nti optimal flatness for posted lithography steps.
3. Emmanju-Enkomerero-ya-Okukola Layini (FEOL).
Ekozesebwa mu mitendera emikulu egy’okuyonja FEOL nga ultra-okuyonja surfaces zeetaagibwa okukula gate oxide, epitaxial deposition, oba ion implantation.
4. Emabega-Enkomerero-ya-Okukola ku Layini (BEOL).
Awagira wafers mu kiseera ky'okuyonja post-etch oba post-deposition okuggya photoresist, etch byproducts, n'obucaafu bw'ebyuma oluvannyuma lw'okutondebwa kw'okuyungibwa.
5. Okupakinga okw’omulembe
Yanguyiza okuyonja ku ddaala lya wafer-nga tonnaba kukola dicing oba bonding mu 2.5D/3D IC packaging, okukakasa obucaafu-free interfaces for reliable interconnects.
6. Okukola ebintu ebikozesebwa mu kukola ebifaananyi (photovoltaic Manufacturing).
Ekozesebwa mu kukola obutoffaali bw’enjuba okuyonja ebitundu bya silikoni, okutumbula omutindo gw’okungulu okusobola okulongoosa okunyiga ekitangaala n’okukyusa amaanyi mu ngeri ennungi.
Eby'bwanannyini
|
Ebintu Ebirabika |
Empisa |
|
Obulongoofu |
＞99.99% |
|
Obuzito |
2.2g/cm3 |
|
Obwerufu |
＞90% |
|
Mohs Obukaluba |
5.5--6.5 |
|
Ensonga y’okukyukakyuka (Deformation Point). |
1280 diguli |
|
Ensonga y’okugonza |
1750 diguli |
|
Ekifo eky’okusiimuula |
1250 diguli |
|
Ebbugumu eryetongodde (20 - 350 diguli ) . |
670J/kkiro. diguli |
|
Obutambuzi bw’ebbugumu (20℃) . |
1.4W/m. diguli |
|
Obutambuzi bw’ebbugumu (w/mk,1000℃) . |
1.0-1.2 |
|
Omuwendo gw’okuzimbulukuka (Refractive Index). |
1.4585 |
|
Omugerageranyo gw’okugaziwa kw’ebbugumu |
5.510 -7cm/cm. diguli |
|
Hot - ekola Ebbugumu |
1750--2050 diguli |
|
Ebbugumu ly'Empeereza ery'ekiseera ekitono - |
1450 diguli |
|
Ebbugumu ly'Empeereza ery'ekiseera ekiwanvu - |
1100 diguli |
|
Ebintu Ebikwata ku Kemiko |
Empisa |
|
Egumira asidi |
Asidi ow’amaanyi(okujjako HF),Alkali ow’amaanyi, solution ey’obutonde |
|
Ebbugumu erya waggulu Egumira okukulukuta |
Suffu |
|
Ebirimu Obucaafu bw’Ekyuma |
<5 ppm |
|
Ebintu by’amasannyalaze |
Empisa |
|
Obuziyiza (Resistivity). |
7107Ω.cm |
|
Amaanyi ga Insulation |
250 ~ 400Kv / sentimita |
|
Ekikyukakyuka kya Dielectric |
3.7~3.9 |
|
Omugerageranyo gw’okunyiga kwa dielectric |
＜410-4 |
|
Omugerageranyo gw’okufiirwa kwa dielectric |
＜110-4 |
|
Ebintu by’Ebyuma |
Empisa |
|
Amaanyi g’okunyigiriza |
1100MPa |
|
Amaanyi g’okubeebalama |
67MPa |
|
Amaanyi g’okusika |
48MPa |
|
Omugerageranyo gwa Poisson |
0.14~0.17 |
|
Modulus ya Young |
72000MPa |
|
Modulus y’okusala |
31000MPa |
Enkola z’okuyonja
Okwoza okunnyika mu mazzi:
Teeka wafer mu lyato ery’okwoza, olwo onnyike eryato ery’okwoza mu mazzi agayonja, era okwongera okukwatagana wakati w’amazzi agooza n’okungulu kwa wafer ng’ositula eryato lya wafer okulongoosa enkola y’okwoza.
Okwoza mu kufuuyira:
Yimirizza eryato ery’okwoza nga lyegolodde mu kisenge omufuuyira, era kozesa entuuyo okufuuyira amazzi ag’okwoza ku wafer okuggyawo obucaafu.
Obukulu bw’okuyonja amaato:
- Okukakasa obuyonjo bwa wafer: Wafer surface ennyonjo kikulu nnyo mu mutindo gw’okukola chips za semiconductor, era eryato eryoza likola kinene nnyo mu nkola y’okuyonja.
- Kakasa nti chips za semiconductor zeesigika: Kakasa nti chips zeesigika n’okukendeeza ku bulema ku bikozesebwa ng’oggyawo obucaafu obuva kungulu.
- Okulongoosa amakungula ga chips za semiconductor: Olongoosa obuyonjo bwa wafers, bwe kityo n’olongoosa amakungula ga chips za semiconductor.
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